Sarangan, Andrew,
Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA. - Taylor CRC Press 2017 - 299х. 27 cm. - Optical sciences and applications of light .
Includes bibliographical references and index.
9781498725576
2016008970
Nanolithography.
Nanostructured materials--Design and construction.
Semiconductors--Etching.
Nanoelectronics--Experiments.
TK7874.843 / S27 2017
621.3815/31 / S-27
Nanofabrication : principles to laboratory practice / Andrew Sarangan, University of Dayton, OH, USA. - Taylor CRC Press 2017 - 299х. 27 cm. - Optical sciences and applications of light .
Includes bibliographical references and index.
9781498725576
2016008970
Nanolithography.
Nanostructured materials--Design and construction.
Semiconductors--Etching.
Nanoelectronics--Experiments.
TK7874.843 / S27 2017
621.3815/31 / S-27