Sarangan, Andrew, <br/><br/>
Nanofabrication :  principles to laboratory practice / 
Andrew Sarangan, University of Dayton, OH, USA. 
 - Taylor   CRC Press  2017 
 - 299х.  27 cm. 
 - Optical sciences and applications of light .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9781498725576 
<br/><br/><label>LCCN: </label>2016008970 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanolithography.<br/>Nanostructured materials--Design and construction.<br/>Semiconductors--Etching.<br/>Nanoelectronics--Experiments.
<br/><br/><label>LC Class. No.: </label>TK7874.843  / S27 2017 
<br/><br/><label>Dewey Class. No.: </label>621.3815/31  / S-27