TY  - BOOK
AU  - Sarangan,Andrew
TI  - Nanofabrication: principles to laboratory practice 
T2  - Optical sciences and applications of light
SN  - 9781498725576
AV  - TK7874.843 S27 2017
U1  - 621.3815/31 23
PY  - 2017///
CY  - Boca Raton
PB  - CRC Press, Taylor & Francis Group
KW  - Nanolithography
KW  - Nanostructured materials
KW  - Design and construction
KW  - Semiconductors
KW  - Etching
KW  - Nanoelectronics
KW  - Experiments
N1  - Includes bibliographical references and index
ER  -