000			01309cam a2200349 i 4500
999			_c1581 _d1581
001			19088092
005			20200512121258.0
008			160510s2017 flu b 001 0 eng
010			_a 2016008970
020			_a9781498725576
040			_aDLC _beng _cШМТДС _erda _dШМТДС
042			_apcc
050	0	0	_aTK7874.843 _bS27 2017
082	0	0	_a621.3815/31 _223 _bS-27
100	1		_aSarangan, Andrew, _eauthor.
245	1	0	_aNanofabrication : _bprinciples to laboratory practice / _cAndrew Sarangan, University of Dayton, OH, USA.
260			_aTaylor _bCRC Press _c2017
264		1	_aBoca Raton : _bCRC Press, Taylor & Francis Group, _c2017.
300			_a299х. _c27 cm.
336			_atext _btxt _2rdacontent
337			_aunmediated _bn _2rdamedia
338			_avolume _bnc _2rdacarrier
490	0		_aOptical sciences and applications of light
504			_aIncludes bibliographical references and index.
650		0	_aNanolithography.
650		0	_aNanostructured materials _xDesign and construction.
650		0	_aSemiconductors _xEtching.
650		0	_aNanoelectronics _xExperiments.
906			_a7 _bcbc _corignew _d1 _eecip _f20 _gy-gencatlg
942			_2ddc _cBK